File:Triple complementary exposure.png
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Size of this preview: 800 × 318 pixels. Other resolutions: 320 × 127 pixels | 1,106 × 439 pixels.
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Summary
[edit]| Description |
English: 3 complementary exposures to achieve 8 cuts saves 5 masks. Far left: 8 cuts for 9-12 nm half-pitch quadruple patterning. Middle left: First exposure covers the whole area of cuts. Middle right: Second exposure of opposite polarity keeps the lines except for most of the cuts. Far right: Third exposure of first polarity defines the remaining cuts. Ref.: F. T. Chen et al., Proc. SPIE vol. 8326, 83262L (2012). |
| Date |
2015-07-06 |
| Source | PowerPoint drawing |
| Author | Guiding light |
Licensing
[edit]Guiding light at en.wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
This file is licensed under the Creative Commons Attribution-Share Alike 3.0 Unported license.
Attribution: Guiding light at en.wikipedia
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Original upload log
[edit]The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2015-07-10 10:56 | 1106×439× (32228 bytes) | Guiding light | Changed 'block' to 'keep' for more clear functional description. |
| 2015-07-08 13:18 | 1106×439× (32265 bytes) | Guiding light | More accurate block pattern edges |
| 2015-07-06 10:56 | 1106×439× (31513 bytes) | Guiding light | Drawing correction |
| 2015-07-06 10:48 | 1106×439× (31340 bytes) | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 06:18, 13 March 2016 | | 1,106 × 439 (31 KB) | OgreBot (talk | contribs) | (BOT): Reverting to most recent version before archival |
| 06:18, 13 March 2016 |  | 1,106 × 439 (32 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-07-08 13:18:35 by Guiding light | |
| 06:18, 13 March 2016 |  | 1,106 × 439 (31 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-07-06 10:56:48 by Guiding light | |
| 06:18, 13 March 2016 |  | 1,106 × 439 (31 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-07-06 10:48:17 by Guiding light | |
| 10:16, 28 February 2016 |  | 1,106 × 439 (31 KB) | FastilyClone (talk | contribs) | Transferred from enwp |
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