File:OPC for 16 nm EUV.png

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Description
English: OPC for 16 nm pattern (13.5 nm wavelength, NA=0.33, sigma=0.6,k1-0.37). From N. B. Cobb Ph.D. Thesis, UC Berkeley, 1998. Asymmetric effects such as shadowing and non-telecentricity (image shifts vs. defocus) have not been included.
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Author Guiding light

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Guiding light at en.wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
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Attribution: Guiding light at en.wikipedia
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The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2014-12-23 14:33 720×713× (14284 bytes) Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

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current10:11, 28 February 2016Thumbnail for version as of 10:11, 28 February 2016720 × 713 (14 KB)FastilyClone (talk | contribs)Transferred from enwp

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