File:Immersion lithography.svg

DescriptionImmersion lithography.svg	Illustration of en:Immersion lithography Polski: mikroskopia imersyjna
Date	10 December 2010, 00:53 (UTC)
Source	Immersion lithography illustration.svg
Author	Immersion lithography illustration.svg: Oleg Alexandrov derivative work: Marek M
SVG development InfoField	The SVG code is valid.   This diagram was created with Inkscape, or with something else.   This SVG diagram uses embedded text. This diagram is a retouched picture, which means that it has been digitally altered from its original version. The original can be viewed here: Immersion lithography illustration.svg: .

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I, the copyright holder of this work, release this work into the public domain. This applies worldwide. In some countries this may not be legally possible; if so: I grant anyone the right to use this work for any purpose, without any conditions, unless such conditions are required by law.

This image is a derivative work of the following images:

• {F|Immersion_lithography_illustration.svg|-}} licensed with PD-self
  • 2007-07-20T02:52:48Z Oleg Alexandrov 433x290 (8417 Bytes) tweak
  • 2007-07-20T02:50:25Z Oleg Alexandrov 433x290 (7148 Bytes) {{Information |Description= Illustration of [[:en:Immersion lithography]] |Source=self-made with [[:en:Inkscape]] |Date= ~~~~~ |Author= [[User:Oleg Alexandrov|Oleg Alexandrov]] }} {{PD-self}} [[Category:Microlithography]]