File:Fraunhofer IPMS Mikroscanner auf einem BSOI Wafer.jpg

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Deutsch: Mit dem Fraunhofer AME75-Prozess fertig prozessierte Mikroscanner auf einem Wafer,

a) bei designspezifischer Strukturierung ausgehend von einem blanken BSOI-Wafer.

b) bei Fertigung mit dem VarioS®-Baukastensystem basierend auf vorprozessierten BSOI-Wafern.
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Author Positiveimpact
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current09:25, 6 June 2011Thumbnail for version as of 09:25, 6 June 20111,209 × 604 (178 KB)Positiveimpact (talk | contribs)

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