File:EUV pattern shift thru-pitch and thru-focus.png

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EUV_pattern_shift_thru-pitch_and_thru-focus.png (457 × 350 pixels, file size: 14 KB, MIME type: image/png)

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Summary

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Description
English: Shows EUV pattern shift as a function of pitch and focus. A dipole illumination is assumed, as likely for 7 nm node. The reference pattern is a 12 nm space. Ref.: Proc. SPIE vol. 8679, 86790W (2013)
Date

2015-04-04

(2015-04-04 (first version); 2015-04-05 (last version))
Source Excel graph
Author Guiding light

Licensing

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Guiding light at en.wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
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Attribution: Guiding light at en.wikipedia
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Original upload log

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The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2015-04-05 08:52 457×350× (14142 bytes) Guiding light Different pitches more relevant to 7 nm node
2015-04-04 10:08 549×342× (15418 bytes) Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

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Date/TimeThumbnailDimensionsUserComment
current06:01, 13 March 2016Thumbnail for version as of 06:01, 13 March 2016457 × 350 (14 KB)OgreBot (talk | contribs)(BOT): Reverting to most recent version before archival
06:01, 13 March 2016Thumbnail for version as of 06:01, 13 March 2016549 × 342 (15 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-04-04 10:08:22 by Guiding light
10:14, 28 February 2016Thumbnail for version as of 10:14, 28 February 2016457 × 350 (14 KB)FastilyClone (talk | contribs)Transferred from enwp

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