File:9 nm half-pitch EUV cuts.png
Jump to navigation
Jump to search
No higher resolution available.
9_nm_half-pitch_EUV_cuts.png (482 × 269 pixels, file size: 8 KB, MIME type: image/png)
Captions
Captions
Add a one-line explanation of what this file represents
Summary
[edit]
| Description |
The number of cut masks increases as half-pitch decreases, for either EUV or 193 nm immersion lithography. For 0.33 NA EUV, the resolution for the regular contact hole array pattern is 19 nm half-pitch. For 193 nm immersion lithography, the resolution is 36 nm half-pitch. Switching to 2D SAQP with grid routing allows more flexibility and reduced cuts. * Y. Wang et al., Proc. SPIE 9426, 94260J (2015).
|
| Date | |
| Source | Excel drawing |
| Author | Guiding light |
Licensing
[edit]
Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
|
Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
This file is licensed under the Creative Commons Attribution-Share Alike 4.0 International license.
Attribution: Guiding light at English Wikipedia
- You are free:
- to share – to copy, distribute and transmit the work
- to remix – to adapt the work
- Under the following conditions:
- attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
- share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.
You may select the license of your choice.
Original upload log
[edit]
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2016-09-23 13:27:15 | 482× 269× | Guiding light | stop at 13 nm |
| 2016-09-23 05:13:26 | 483× 265× | Guiding light | 9 nm half-pitch GR |
| 2016-09-22 05:14:52 | 483× 265× | Guiding light | updated for 18 nm hp |
| 2016-09-21 12:41:33 | 483× 296× | Guiding light | 1 cut for 2D |
| 2016-09-21 07:42:19 | 483× 296× | Guiding light | Add 2D case |
| 2016-09-21 06:20:50 | 482× 286× | Guiding light | correction |
| 2016-09-21 06:11:52 | 482× 295× | Guiding light | Show trend toward limit |
| 2016-09-21 05:58:52 | 288× 274× | Guiding light | Previous violated 19 nm half-pitch lower limit |
| 2016-09-16 15:06:30 | 421× 316× | Guiding light | 4 cuts instead of 8 |
| 2016-09-14 02:06:56 | 421× 316× | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
File history
Click on a date/time to view the file as it appeared at that time.
| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 18:50, 8 October 2016 | | 482 × 269 (8 KB) | OgreBot (talk | contribs) | (BOT): Reverting to most recent version before archival |
| 18:50, 8 October 2016 |  | 483 × 265 (11 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-09-23 05:13:26 by Guiding light | |
| 18:50, 8 October 2016 |  | 483 × 265 (10 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-09-22 05:14:52 by Guiding light | |
| 18:50, 8 October 2016 |  | 483 × 296 (11 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-09-21 12:41:33 by Guiding light | |
| 18:50, 8 October 2016 |  | 483 × 296 (11 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-09-21 07:42:19 by Guiding light | |
| 18:50, 8 October 2016 |  | 482 × 286 (10 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-09-21 06:20:50 by Guiding light | |
| 18:50, 8 October 2016 |  | 482 × 295 (10 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-09-21 06:11:52 by Guiding light | |
| 18:50, 8 October 2016 |  | 288 × 274 (4 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-09-21 05:58:52 by Guiding light | |
| 18:50, 8 October 2016 |  | 421 × 316 (7 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-09-16 15:06:30 by Guiding light | |
| 18:50, 8 October 2016 |  | 421 × 316 (7 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-09-14 02:06:56 by Guiding light |
You cannot overwrite this file.
File usage on Commons
There are no pages that use this file.
