File:8 nm hp EUV polarization.PNG

From Wikimedia Commons, the free media repository
Jump to navigation Jump to search

8_nm_hp_EUV_polarization.PNG (621 × 408 pixels, file size: 15 KB, MIME type: image/png)

Captions

Captions

Add a one-line explanation of what this file represents

Summary

[edit]
Description
English: This coherent two-beam interference image formed by 13.5 nm EUV light at 8 nm half-pitch is critically dependent on polarization state. For the natural unpolarized state, there is already significant loss of contrast compared to the ideal, TE-polarized state. For the naturally assumed 50% average pattern density, the effective flare level (due to the lowered contrast from the TM component) for the unpolarized case is 18%.[1]

References

  1. J. Cobb et al., "Flare compensation in EUV Lithography," 2003 EUV Symposium, Antwerp.
Date 15 March 2010 (original upload date)
Source Transferred from en.wikipedia to Commons.
Author Guiding light at English Wikipedia

Licensing

[edit]
Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
w:en:Creative Commons
attribution share alike
This file is licensed under the Creative Commons Attribution-Share Alike 3.0 Unported, 2.5 Generic, 2.0 Generic and 1.0 Generic license.
You are free:
  • to share – to copy, distribute and transmit the work
  • to remix – to adapt the work
Under the following conditions:
  • attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
  • share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
You may select the license of your choice.

Original upload log

[edit]
The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2010-03-15 08:22 621×408× (15825 bytes) Guiding light The image formed by 13.5 nm EUV light at 8 nm half-pitch is critically dependent on polarization state. For the natural unpolarized state, there is already significant loss of contrast compared to the ideal, TE-polarized state.

File history

Click on a date/time to view the file as it appeared at that time.

Date/TimeThumbnailDimensionsUserComment
current10:08, 28 February 2016Thumbnail for version as of 10:08, 28 February 2016621 × 408 (15 KB)FastilyClone (talk | contribs)Transferred from enwp

There are no pages that use this file.