File:16 nm 2-bar CD asymmetry through focus.png

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16_nm_2-bar_CD_asymmetry_through_focus.png (738 × 289 pixels, file size: 8 KB, MIME type: image/png)

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Summary

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Description The dark field two-bar (16 nm) CD asymmetry through focus is affected by source asymmetry and use of assist features. Ref.: T. Last et al., Proc. SPIE 10143, 1014311 (2017).
Date
Source Excel
Author Guiding light

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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
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The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2017-05-27 06:04:17 738 × 289 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

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Date/TimeThumbnailDimensionsUserComment
current21:35, 11 May 2018Thumbnail for version as of 21:35, 11 May 2018738 × 289 (8 KB)Willy1018 (talk | contribs)Transferred from en.wikipedia (MTC!) (1.1.0)

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